ISMI Readies 450 mm Equipment Metrics

TOP STORY... April 7, 2009

The ISMI 450 mm program is moving from wafer handling tests to developing guidelines for early 450 mm wafer process equipment. The consortium posted equipment performance metrics (EPMs) to its website for the major tool types needed for a demonstration line. "Test wafer equipment development and demonstrations are on track starting by the middle of 2009," said Tom Jefferson, 450 mm program manager.
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Posted in: semiconductors,wafer handling